Xyoo 2020, ntau tshaj li ib lab lab chips tau tsim tawm thoob ntiaj teb, uas sib npaug rau 130 chips muaj thiab siv los ntawm txhua tus neeg hauv ntiaj teb.Txawm li cas los xij, tsis ntev los no nti tsis txaus tseem qhia tau tias tus lej no tseem tsis tau txog nws qhov kev txwv siab.
Txawm hais tias chips tuaj yeem tsim tau rau ntawm qhov loj me, ua rau lawv tsis yog ib txoj haujlwm yooj yim.Cov txheej txheem ntawm kev tsim cov chips yog qhov nyuaj, thiab niaj hnub no peb yuav hais txog rau 6 cov kauj ruam tseem ceeb tshaj plaws: deposition, photoresist txheej, lithography, etching, ion implantation, thiab ntim.
Deposition
Cov kauj ruam deposition pib nrog lub wafer, uas yog txiav los ntawm ib tug 99.99% ntshiab silicon lub tog raj kheej (tseem hu ua "silicon ingot") thiab polished mus rau ib tug heev du tiav, thiab ces ib tug nyias zaj duab xis ntawm conductor, insulator, los yog semiconductor cov ntaub ntawv yog muab tso rau. mus rau lub wafer, nyob ntawm seb cov txheej txheem yuav tsum tau, thiaj li hais tias thawj txheej tuaj yeem luam tawm ntawm nws.Cov kauj ruam tseem ceeb no feem ntau hu ua "deposition".
Raws li cov chips ua me me thiab me, cov qauv luam ntawv ntawm wafers ua ntau dua.Kev nce qib hauv kev tso nyiaj, etching thiab lithography yog qhov tseem ceeb rau kev ua cov chips me me thiab yog li tsav kev txuas ntxiv ntawm Moore Txoj Cai.Qhov no suav nrog cov txheej txheem tshiab uas siv cov ntaub ntawv tshiab los ua kom cov txheej txheem tso nyiaj ntau dua.
Photoresist Txheej
Cov wafers ces coated nrog cov khoom siv photosensitive hu ua "photoresist" (tseem hu ua "photoresist").Muaj ob hom photoresists - "zoo photoresists" thiab "tsis zoo photoresists".
Lub ntsiab sib txawv ntawm qhov zoo thiab qhov tsis zoo photoresists yog cov qauv tshuaj ntawm cov khoom thiab txoj kev photoresist reacts rau lub teeb.Nyob rau hauv cov ntaub ntawv ntawm zoo photoresists, thaj tsam raug UV teeb hloov qauv thiab ua ntau soluble, yog li npaj nws rau etching thiab deposition.Tsis zoo photoresists, ntawm qhov tod tes, polymerize nyob rau hauv cov cheeb tsam raug rau lub teeb, uas ua rau lawv nyuaj rau yaj.Zoo photoresists yog cov feem ntau siv nyob rau hauv semiconductor manufacturing vim hais tias lawv muaj peev xwm ua tau siab dua kev daws teeb meem, ua rau lawv xaiv zoo dua rau theem lithography.Tam sim no muaj ntau lub tuam txhab thoob ntiaj teb uas tsim cov photoresists rau kev tsim khoom semiconductor.
Photolithography
Photolithography yog ib qho tseem ceeb nyob rau hauv cov txheej txheem tsim chip vim nws txiav txim siab npaum li cas cov transistors ntawm lub nti yuav ua tau.Nyob rau theem no, cov wafers tau muab tso rau hauv lub tshuab photolithography thiab raug rau lub teeb sib sib zog nqus ultraviolet.Ntau zaus lawv muaj ntau txhiab zaus me dua li cov xuab zeb.
Lub teeb yog npaj rau ntawm lub wafer los ntawm "daim npog ntsej muag" thiab cov lithography optics (lub lens ntawm DUV system) shrinks thiab tsom rau cov qauv tsim Circuit Court ntawm daim npog ntsej muag mus rau photoresist ntawm lub wafer.Raws li tau piav qhia yav dhau los, thaum lub teeb hits lub photoresist, kev hloov tshuaj lom neeg tshwm sim uas luam tawm cov qauv ntawm daim npog ntsej muag mus rau txheej txheej photoresist.
Tau txais tus qauv nthuav tawm raws nraim yog txoj haujlwm tsis yooj yim, nrog rau kev cuam tshuam ntawm qhov cuam tshuam, kev cuam tshuam thiab lwm yam tsis xws luag ntawm lub cev lossis tshuaj lom neeg txhua qhov ua tau hauv cov txheej txheem.Tias yog vim li cas qee zaum peb yuav tsum ua kom zoo dua qhov kev nthuav tawm zaum kawg los ntawm kev kho tus qauv ntawm lub npog ntsej muag kom cov qauv luam tawm zoo li peb xav tau.Peb lub kaw lus siv "computational lithography" los ua ke cov qauv algorithmic nrog cov ntaub ntawv los ntawm lub tshuab lithography thiab kuaj wafers los tsim lub npog ntsej muag uas txawv kiag li ntawm qhov kawg raug tus qauv, tab sis qhov no yog qhov peb xav ua kom tiav vim tias tsuas yog txoj hauv kev tau txais xav raug tus qauv.
Etching
Cov kauj ruam tom ntej yog tshem tawm cov degraded photoresist kom nthuav tawm cov qauv xav tau.Thaum lub sij hawm "etch" txheej txheem, lub wafer yog ci thiab tsim, thiab ib co ntawm cov photoresist yog ntxuav tawm los qhia ib tug qhib channel 3D qauv.Cov txheej txheem etching yuav tsum tsim cov yam ntxwv zoo meej thiab tsis tu ncua yam tsis muaj kev cuam tshuam tag nrho kev ncaj ncees thiab kev ruaj ntseg ntawm cov qauv nti.Advanced etching cov tswv yim pub chip manufacturers siv ob npaug, plaub thiab spacer-raws li qauv los tsim cov me me qhov ntev ntawm niaj hnub nti tsim.
Zoo li photoresists, etching muab faib ua "qhuav" thiab "ntub" hom.Qhuav etching siv cov roj los txhais cov qauv nthuav tawm ntawm lub wafer.Kev ntub dej etching siv cov txheej txheem tshuaj los ntxuav lub wafer.
Ib nti muaj ntau txheej txheej, yog li etching yuav tsum tau ua tib zoo tswj kom tsis txhob ua rau cov txheej txheem ntawm cov txheej txheem ntau txheej.Yog tias lub hom phiaj ntawm etching yog tsim kom muaj kab noj hniav hauv cov qauv, nws yog ib qho tsim nyog los xyuas kom meej tias qhov tob ntawm cov kab noj hniav yog raws nraim.Qee cov qauv tsim nrog txog li 175 txheej, xws li 3D NAND, ua rau cov kauj ruam tshwj xeeb tseem ceeb thiab nyuaj.
Kev txhaj tshuaj ion
Thaum tus qauv yog etched mus rau lub wafer, lub wafer yog bombarded nrog zoo los yog tsis zoo ions los kho cov conductive zog ntawm ib feem ntawm cov qauv.Raws li cov khoom siv rau wafers, cov khoom siv raw silicon tsis yog ib qho zoo tshaj plaws insulator los yog ib tug zoo meej conductor.Silicon's conductive zog poob qhov chaw nyob nruab nrab.
Directing them ions rau hauv silicon siv lead ua kom cov dej ntws ntawm hluav taws xob tuaj yeem tswj tau los tsim cov hluav taws xob hloov hluav taws xob uas yog cov hauv paus tsev thaiv ntawm cov nti, cov transistors, hu ua "ionization", los yog "ion implantation".Tom qab txheej txheej tau ionized, qhov seem ntawm photoresist siv los tiv thaiv qhov chaw tsis-etched raug tshem tawm.
Ntim
Ntau txhiab kauj ruam yuav tsum tau tsim ib lub nti ntawm lub wafer, thiab nws yuav siv sij hawm ntau tshaj peb lub hlis los ntawm kev tsim mus rau ntau lawm.Txhawm rau tshem tawm cov nti ntawm lub wafer, nws raug txiav mus rau hauv ib tus neeg chips siv lub pob zeb diamond pom.Cov chips no, hu ua "dawb tuag," yog cais los ntawm 12-nti wafer, qhov loj tshaj plaws siv nyob rau hauv semiconductor manufacturing, thiab vim hais tias qhov luaj li cas ntawm cov chips txawv, qee cov wafers tuaj yeem muaj ntau txhiab chips, thaum lwm tus tsuas muaj ob peb. kaum os.
Cov wafers liab qab no tau muab tso rau ntawm "substrate" - lub substrate uas siv cov ntawv hlau los coj cov tswv yim thiab cov teeb liab tawm ntawm cov liab qab wafer mus rau lwm qhov system.Tom qab ntawd nws tau them nrog "lub dab dej kub", lub thawv me me, tiaj tus hlau tiv thaiv uas muaj lub tshuab ua kom txias kom ntseeg tau tias cov nti nyob twj ywm txias thaum lub sijhawm ua haujlwm.
Tuam txhab Profile
Zhejiang NeoDen Technology Co., Ltd. tau raug tsim thiab xa tawm ntau yam me me thiab qhov chaw tshuab txij li xyoo 2010. Ua kom zoo dua ntawm peb tus kheej muaj kev paub txog R&D, kev cob qhia zoo, NeoDen yeej lub koob npe nrov los ntawm cov neeg siv khoom thoob ntiaj teb.
Nrog lub ntiaj teb muaj nyob hauv ntau dua 130 lub teb chaws, kev ua tau zoo heev, qhov tseeb thiab kev ntseeg siab ntawm NeoDenPNP machinesua rau lawv zoo meej rau R & D, kev tshaj lij prototyping thiab me me rau nruab nrab batch ntau lawm.Peb muab kev daws teeb meem ntawm ib qho khoom siv SMT nres.
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Xov tooj: 86-571-26266266
Lub sij hawm xa tuaj: Plaub Hlis-24-2022